This is the latest oxygen analyzer from Yokogawa, and its development was based on the company's long experience and strong track record with this technology.
A proprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life.
The OX400 can be used to control and monitor various semiconductor applications, and to control environment, air leakage into inert gas, and other processes.
・ | Oxygen concentration control in semiconductor-related diffusion and drying furnaces and in LCD manufacturing processes |
・ | Oxygen concentration control in solder pot flow and re-flow ovens, and glove boxes used in electronics manufacturing, and in gas production processes |
・ | Oxygen concentration measurements to prevent dust explosions during powder transfer |
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